5/27/2011	2:30:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2011	2:30:38 PM	Recipe started at 2:30 PM
5/27/2011	2:30:38 PM	H2 valve closed
5/27/2011	2:30:38 PM	BCl3 valve closed
5/27/2011	2:30:38 PM	PH3 valve closed
5/27/2011	2:30:38 PM	SiCl4 pre valve closed
5/27/2011	2:30:38 PM	SiCl4 post valve closed
5/27/2011	2:30:38 PM	Main Vac valve closed
5/27/2011	2:30:38 PM	Bypass valve closed
5/27/2011	2:30:38 PM	Bubbler valve closed
5/27/2011	2:30:38 PM	Helium valve opened
5/27/2011	2:30:38 PM	Helium MFC set to  500.000000
5/27/2011	2:30:38 PM	H2 MFC set to  0.000000
5/27/2011	2:30:38 PM	BCl3 MFC set to  0.000000
5/27/2011	2:30:38 PM	PHl3 MFC set to  0.000000
5/27/2011	2:30:38 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:30:38 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:30:38 PM	Tube furnace set to 0
5/27/2011	2:31:57 PM	Helium valve closed
5/27/2011	2:31:57 PM	H2 valve closed
5/27/2011	2:31:57 PM	BCl3 valve closed
5/27/2011	2:31:57 PM	PH3 valve closed
5/27/2011	2:31:57 PM	SiCl4 pre valve closed
5/27/2011	2:31:57 PM	SiCl4 post valve closed
5/27/2011	2:31:57 PM	Main Vac valve closed
5/27/2011	2:31:57 PM	Bypass valve closed
5/27/2011	2:31:57 PM	Bubbler valve closed
5/27/2011	2:31:57 PM	Helium MFC set to  0.000000
5/27/2011	2:31:57 PM	H2 MFC set to  0.000000
5/27/2011	2:31:57 PM	BCl3 MFC set to  0.000000
5/27/2011	2:31:57 PM	PHl3 MFC set to  0.000000
5/27/2011	2:31:57 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:31:57 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:31:57 PM	Tube furnace set to 0
5/27/2011	2:31:57 PM	Run finished at 2:31 PM
5/27/2011	2:31:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/27/2011	2:34:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/27/2011	2:34:34 PM	Recipe started at 2:34 PM
5/27/2011	2:34:34 PM	Helium valve closed
5/27/2011	2:34:34 PM	H2 valve closed
5/27/2011	2:34:34 PM	BCl3 valve closed
5/27/2011	2:34:34 PM	PH3 valve closed
5/27/2011	2:34:34 PM	SiCl4 pre valve closed
5/27/2011	2:34:34 PM	SiCl4 post valve closed
5/27/2011	2:34:34 PM	Main Vac valve closed
5/27/2011	2:34:34 PM	Bubbler valve closed
5/27/2011	2:34:34 PM	Bypass valve opened
5/27/2011	2:34:34 PM	Helium MFC set to  0.000000
5/27/2011	2:34:34 PM	H2 MFC set to  0.000000
5/27/2011	2:34:34 PM	BCl3 MFC set to  0.000000
5/27/2011	2:34:34 PM	PHl3 MFC set to  0.000000
5/27/2011	2:34:34 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:34:34 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:34:35 PM	Tube furnace set to 0
5/27/2011	2:35:07 PM	Helium valve closed
5/27/2011	2:35:07 PM	H2 valve closed
5/27/2011	2:35:07 PM	BCl3 valve closed
5/27/2011	2:35:07 PM	PH3 valve closed
5/27/2011	2:35:07 PM	SiCl4 pre valve closed
5/27/2011	2:35:07 PM	SiCl4 post valve closed
5/27/2011	2:35:07 PM	Bubbler valve closed
5/27/2011	2:35:07 PM	Main Vac valve opened
5/27/2011	2:35:07 PM	Bypass valve opened
5/27/2011	2:35:07 PM	Helium MFC set to  0.000000
5/27/2011	2:35:07 PM	H2 MFC set to  0.000000
5/27/2011	2:35:07 PM	BCl3 MFC set to  0.000000
5/27/2011	2:35:07 PM	PHl3 MFC set to  0.000000
5/27/2011	2:35:07 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:35:07 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:35:07 PM	Tube furnace set to 0
5/27/2011	2:36:07 PM	H2 valve closed
5/27/2011	2:36:07 PM	BCl3 valve closed
5/27/2011	2:36:07 PM	PH3 valve closed
5/27/2011	2:36:07 PM	SiCl4 pre valve closed
5/27/2011	2:36:07 PM	SiCl4 post valve closed
5/27/2011	2:36:07 PM	Bubbler valve closed
5/27/2011	2:36:07 PM	Helium valve opened
5/27/2011	2:36:07 PM	Main Vac valve opened
5/27/2011	2:36:07 PM	Bypass valve opened
5/27/2011	2:36:07 PM	Helium MFC set to  100.000000
5/27/2011	2:36:07 PM	H2 MFC set to  0.000000
5/27/2011	2:36:07 PM	BCl3 MFC set to  0.000000
5/27/2011	2:36:07 PM	PHl3 MFC set to  0.000000
5/27/2011	2:36:07 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:36:07 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:36:07 PM	Tube furnace set to 0
5/27/2011	2:37:07 PM	Helium valve closed
5/27/2011	2:37:07 PM	H2 valve closed
5/27/2011	2:37:07 PM	BCl3 valve closed
5/27/2011	2:37:07 PM	PH3 valve closed
5/27/2011	2:37:07 PM	SiCl4 pre valve closed
5/27/2011	2:37:07 PM	SiCl4 post valve closed
5/27/2011	2:37:07 PM	Bubbler valve closed
5/27/2011	2:37:07 PM	Main Vac valve opened
5/27/2011	2:37:07 PM	Bypass valve opened
5/27/2011	2:37:07 PM	Helium MFC set to  0.000000
5/27/2011	2:37:07 PM	H2 MFC set to  0.000000
5/27/2011	2:37:07 PM	BCl3 MFC set to  0.000000
5/27/2011	2:37:07 PM	PHl3 MFC set to  0.000000
5/27/2011	2:37:07 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:37:07 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:37:07 PM	Tube furnace set to 0
5/27/2011	2:38:07 PM	H2 valve closed
5/27/2011	2:38:07 PM	BCl3 valve closed
5/27/2011	2:38:07 PM	PH3 valve closed
5/27/2011	2:38:07 PM	SiCl4 pre valve closed
5/27/2011	2:38:07 PM	SiCl4 post valve closed
5/27/2011	2:38:07 PM	Bubbler valve closed
5/27/2011	2:38:07 PM	Helium valve opened
5/27/2011	2:38:07 PM	Main Vac valve opened
5/27/2011	2:38:07 PM	Bypass valve opened
5/27/2011	2:38:07 PM	Helium MFC set to  100.000000
5/27/2011	2:38:07 PM	H2 MFC set to  0.000000
5/27/2011	2:38:07 PM	BCl3 MFC set to  0.000000
5/27/2011	2:38:07 PM	PHl3 MFC set to  0.000000
5/27/2011	2:38:07 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:38:07 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:38:07 PM	Tube furnace set to 0
5/27/2011	2:39:07 PM	Helium valve closed
5/27/2011	2:39:07 PM	H2 valve closed
5/27/2011	2:39:07 PM	BCl3 valve closed
5/27/2011	2:39:07 PM	PH3 valve closed
5/27/2011	2:39:07 PM	SiCl4 pre valve closed
5/27/2011	2:39:07 PM	SiCl4 post valve closed
5/27/2011	2:39:07 PM	Bubbler valve closed
5/27/2011	2:39:07 PM	Main Vac valve opened
5/27/2011	2:39:07 PM	Bypass valve opened
5/27/2011	2:39:07 PM	Helium MFC set to  0.000000
5/27/2011	2:39:07 PM	H2 MFC set to  0.000000
5/27/2011	2:39:07 PM	BCl3 MFC set to  0.000000
5/27/2011	2:39:07 PM	PHl3 MFC set to  0.000000
5/27/2011	2:39:07 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:39:07 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:39:08 PM	Tube furnace set to 0
5/27/2011	2:40:08 PM	H2 valve closed
5/27/2011	2:40:08 PM	BCl3 valve closed
5/27/2011	2:40:08 PM	PH3 valve closed
5/27/2011	2:40:08 PM	SiCl4 pre valve closed
5/27/2011	2:40:08 PM	SiCl4 post valve closed
5/27/2011	2:40:08 PM	Bubbler valve closed
5/27/2011	2:40:08 PM	Helium valve opened
5/27/2011	2:40:08 PM	Main Vac valve opened
5/27/2011	2:40:08 PM	Bypass valve opened
5/27/2011	2:40:08 PM	Helium MFC set to  100.000000
5/27/2011	2:40:08 PM	H2 MFC set to  0.000000
5/27/2011	2:40:08 PM	BCl3 MFC set to  0.000000
5/27/2011	2:40:08 PM	PHl3 MFC set to  0.000000
5/27/2011	2:40:08 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:40:08 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:40:08 PM	Tube furnace set to 0
5/27/2011	2:41:08 PM	Helium valve closed
5/27/2011	2:41:08 PM	H2 valve closed
5/27/2011	2:41:08 PM	BCl3 valve closed
5/27/2011	2:41:08 PM	PH3 valve closed
5/27/2011	2:41:08 PM	SiCl4 pre valve closed
5/27/2011	2:41:08 PM	SiCl4 post valve closed
5/27/2011	2:41:08 PM	Bubbler valve closed
5/27/2011	2:41:08 PM	Main Vac valve opened
5/27/2011	2:41:08 PM	Bypass valve opened
5/27/2011	2:41:08 PM	Helium MFC set to  0.000000
5/27/2011	2:41:08 PM	H2 MFC set to  0.000000
5/27/2011	2:41:08 PM	BCl3 MFC set to  0.000000
5/27/2011	2:41:08 PM	PHl3 MFC set to  0.000000
5/27/2011	2:41:08 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:41:08 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:41:08 PM	Tube furnace set to 0
5/27/2011	2:42:08 PM	H2 valve closed
5/27/2011	2:42:08 PM	BCl3 valve closed
5/27/2011	2:42:08 PM	PH3 valve closed
5/27/2011	2:42:08 PM	SiCl4 pre valve closed
5/27/2011	2:42:08 PM	SiCl4 post valve closed
5/27/2011	2:42:08 PM	Bubbler valve closed
5/27/2011	2:42:08 PM	Helium valve opened
5/27/2011	2:42:08 PM	Main Vac valve opened
5/27/2011	2:42:08 PM	Bypass valve opened
5/27/2011	2:42:08 PM	Helium MFC set to  100.000000
5/27/2011	2:42:08 PM	H2 MFC set to  0.000000
5/27/2011	2:42:08 PM	BCl3 MFC set to  0.000000
5/27/2011	2:42:08 PM	PHl3 MFC set to  0.000000
5/27/2011	2:42:08 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:42:08 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:42:08 PM	Tube furnace set to 0
5/27/2011	2:43:08 PM	Helium valve closed
5/27/2011	2:43:08 PM	H2 valve closed
5/27/2011	2:43:08 PM	BCl3 valve closed
5/27/2011	2:43:08 PM	PH3 valve closed
5/27/2011	2:43:08 PM	SiCl4 pre valve closed
5/27/2011	2:43:08 PM	SiCl4 post valve closed
5/27/2011	2:43:08 PM	Bubbler valve closed
5/27/2011	2:43:08 PM	Main Vac valve opened
5/27/2011	2:43:08 PM	Bypass valve opened
5/27/2011	2:43:08 PM	Helium MFC set to  0.000000
5/27/2011	2:43:08 PM	H2 MFC set to  0.000000
5/27/2011	2:43:08 PM	BCl3 MFC set to  0.000000
5/27/2011	2:43:08 PM	PHl3 MFC set to  0.000000
5/27/2011	2:43:08 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:43:08 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:43:08 PM	Tube furnace set to 0
5/27/2011	2:44:08 PM	H2 valve closed
5/27/2011	2:44:08 PM	BCl3 valve closed
5/27/2011	2:44:08 PM	PH3 valve closed
5/27/2011	2:44:08 PM	SiCl4 pre valve closed
5/27/2011	2:44:08 PM	SiCl4 post valve closed
5/27/2011	2:44:08 PM	Bubbler valve closed
5/27/2011	2:44:08 PM	Helium valve opened
5/27/2011	2:44:08 PM	Main Vac valve opened
5/27/2011	2:44:08 PM	Bypass valve opened
5/27/2011	2:44:08 PM	Helium MFC set to  100.000000
5/27/2011	2:44:08 PM	H2 MFC set to  0.000000
5/27/2011	2:44:08 PM	BCl3 MFC set to  0.000000
5/27/2011	2:44:08 PM	PHl3 MFC set to  0.000000
5/27/2011	2:44:08 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:44:08 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:44:09 PM	Tube furnace set to 0
5/27/2011	2:45:09 PM	Helium valve closed
5/27/2011	2:45:09 PM	H2 valve closed
5/27/2011	2:45:09 PM	BCl3 valve closed
5/27/2011	2:45:09 PM	PH3 valve closed
5/27/2011	2:45:09 PM	SiCl4 pre valve closed
5/27/2011	2:45:09 PM	SiCl4 post valve closed
5/27/2011	2:45:09 PM	Bubbler valve closed
5/27/2011	2:45:09 PM	Main Vac valve opened
5/27/2011	2:45:09 PM	Bypass valve opened
5/27/2011	2:45:09 PM	Helium MFC set to  0.000000
5/27/2011	2:45:09 PM	H2 MFC set to  0.000000
5/27/2011	2:45:09 PM	BCl3 MFC set to  0.000000
5/27/2011	2:45:09 PM	PHl3 MFC set to  0.000000
5/27/2011	2:45:09 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:45:09 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:45:09 PM	Tube furnace set to 0
5/27/2011	2:46:09 PM	H2 valve closed
5/27/2011	2:46:09 PM	BCl3 valve closed
5/27/2011	2:46:09 PM	PH3 valve closed
5/27/2011	2:46:09 PM	SiCl4 pre valve closed
5/27/2011	2:46:09 PM	SiCl4 post valve closed
5/27/2011	2:46:09 PM	Bubbler valve closed
5/27/2011	2:46:09 PM	Helium valve opened
5/27/2011	2:46:09 PM	Main Vac valve opened
5/27/2011	2:46:09 PM	Bypass valve opened
5/27/2011	2:46:09 PM	Helium MFC set to  100.000000
5/27/2011	2:46:09 PM	H2 MFC set to  0.000000
5/27/2011	2:46:09 PM	BCl3 MFC set to  0.000000
5/27/2011	2:46:09 PM	PHl3 MFC set to  0.000000
5/27/2011	2:46:09 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:46:09 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:46:09 PM	Tube furnace set to 0
5/27/2011	2:47:09 PM	Helium valve closed
5/27/2011	2:47:09 PM	H2 valve closed
5/27/2011	2:47:09 PM	BCl3 valve closed
5/27/2011	2:47:09 PM	PH3 valve closed
5/27/2011	2:47:09 PM	SiCl4 pre valve closed
5/27/2011	2:47:09 PM	SiCl4 post valve closed
5/27/2011	2:47:09 PM	Bubbler valve closed
5/27/2011	2:47:09 PM	Main Vac valve opened
5/27/2011	2:47:09 PM	Bypass valve opened
5/27/2011	2:47:09 PM	Helium MFC set to  0.000000
5/27/2011	2:47:09 PM	H2 MFC set to  0.000000
5/27/2011	2:47:09 PM	BCl3 MFC set to  0.000000
5/27/2011	2:47:09 PM	PHl3 MFC set to  0.000000
5/27/2011	2:47:09 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:47:09 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:47:09 PM	Tube furnace set to 0
5/27/2011	2:48:09 PM	H2 valve closed
5/27/2011	2:48:09 PM	BCl3 valve closed
5/27/2011	2:48:09 PM	PH3 valve closed
5/27/2011	2:48:09 PM	SiCl4 pre valve closed
5/27/2011	2:48:09 PM	SiCl4 post valve closed
5/27/2011	2:48:09 PM	Bubbler valve closed
5/27/2011	2:48:09 PM	Helium valve opened
5/27/2011	2:48:09 PM	Main Vac valve opened
5/27/2011	2:48:09 PM	Bypass valve opened
5/27/2011	2:48:09 PM	Helium MFC set to  100.000000
5/27/2011	2:48:09 PM	H2 MFC set to  0.000000
5/27/2011	2:48:09 PM	BCl3 MFC set to  0.000000
5/27/2011	2:48:09 PM	PHl3 MFC set to  0.000000
5/27/2011	2:48:09 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:48:09 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:48:09 PM	Tube furnace set to 0
5/27/2011	2:49:09 PM	Helium valve closed
5/27/2011	2:49:09 PM	H2 valve closed
5/27/2011	2:49:09 PM	BCl3 valve closed
5/27/2011	2:49:09 PM	PH3 valve closed
5/27/2011	2:49:09 PM	SiCl4 pre valve closed
5/27/2011	2:49:09 PM	SiCl4 post valve closed
5/27/2011	2:49:09 PM	Bubbler valve closed
5/27/2011	2:49:09 PM	Main Vac valve opened
5/27/2011	2:49:09 PM	Bypass valve opened
5/27/2011	2:49:09 PM	Helium MFC set to  0.000000
5/27/2011	2:49:09 PM	H2 MFC set to  0.000000
5/27/2011	2:49:09 PM	BCl3 MFC set to  0.000000
5/27/2011	2:49:09 PM	PHl3 MFC set to  0.000000
5/27/2011	2:49:09 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:49:09 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:49:10 PM	Tube furnace set to 0
5/27/2011	2:50:10 PM	H2 valve closed
5/27/2011	2:50:10 PM	BCl3 valve closed
5/27/2011	2:50:10 PM	PH3 valve closed
5/27/2011	2:50:10 PM	SiCl4 pre valve closed
5/27/2011	2:50:10 PM	SiCl4 post valve closed
5/27/2011	2:50:10 PM	Bubbler valve closed
5/27/2011	2:50:10 PM	Helium valve opened
5/27/2011	2:50:10 PM	Main Vac valve opened
5/27/2011	2:50:10 PM	Bypass valve opened
5/27/2011	2:50:10 PM	Helium MFC set to  100.000000
5/27/2011	2:50:10 PM	H2 MFC set to  0.000000
5/27/2011	2:50:10 PM	BCl3 MFC set to  0.000000
5/27/2011	2:50:10 PM	PHl3 MFC set to  0.000000
5/27/2011	2:50:10 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:50:10 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:50:10 PM	Tube furnace set to 0
5/27/2011	2:51:10 PM	Helium valve closed
5/27/2011	2:51:10 PM	H2 valve closed
5/27/2011	2:51:10 PM	BCl3 valve closed
5/27/2011	2:51:10 PM	PH3 valve closed
5/27/2011	2:51:10 PM	SiCl4 pre valve closed
5/27/2011	2:51:10 PM	SiCl4 post valve closed
5/27/2011	2:51:10 PM	Bubbler valve closed
5/27/2011	2:51:10 PM	Main Vac valve opened
5/27/2011	2:51:10 PM	Bypass valve opened
5/27/2011	2:51:10 PM	Helium MFC set to  0.000000
5/27/2011	2:51:10 PM	H2 MFC set to  0.000000
5/27/2011	2:51:10 PM	BCl3 MFC set to  0.000000
5/27/2011	2:51:10 PM	PHl3 MFC set to  0.000000
5/27/2011	2:51:10 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:51:10 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:51:10 PM	Tube furnace set to 0
5/27/2011	2:52:10 PM	H2 valve closed
5/27/2011	2:52:10 PM	BCl3 valve closed
5/27/2011	2:52:10 PM	PH3 valve closed
5/27/2011	2:52:10 PM	SiCl4 pre valve closed
5/27/2011	2:52:10 PM	SiCl4 post valve closed
5/27/2011	2:52:10 PM	Bubbler valve closed
5/27/2011	2:52:10 PM	Helium valve opened
5/27/2011	2:52:10 PM	Main Vac valve opened
5/27/2011	2:52:10 PM	Bypass valve opened
5/27/2011	2:52:10 PM	Helium MFC set to  100.000000
5/27/2011	2:52:10 PM	H2 MFC set to  0.000000
5/27/2011	2:52:10 PM	BCl3 MFC set to  0.000000
5/27/2011	2:52:10 PM	PHl3 MFC set to  0.000000
5/27/2011	2:52:10 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:52:10 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:52:10 PM	Tube furnace set to 0
5/27/2011	2:53:10 PM	Helium valve closed
5/27/2011	2:53:10 PM	H2 valve closed
5/27/2011	2:53:10 PM	BCl3 valve closed
5/27/2011	2:53:10 PM	PH3 valve closed
5/27/2011	2:53:10 PM	SiCl4 pre valve closed
5/27/2011	2:53:10 PM	SiCl4 post valve closed
5/27/2011	2:53:10 PM	Bubbler valve closed
5/27/2011	2:53:10 PM	Main Vac valve opened
5/27/2011	2:53:10 PM	Bypass valve opened
5/27/2011	2:53:10 PM	Helium MFC set to  0.000000
5/27/2011	2:53:10 PM	H2 MFC set to  0.000000
5/27/2011	2:53:10 PM	BCl3 MFC set to  0.000000
5/27/2011	2:53:10 PM	PHl3 MFC set to  0.000000
5/27/2011	2:53:10 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:53:10 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:53:10 PM	Tube furnace set to 0
5/27/2011	2:54:10 PM	H2 valve closed
5/27/2011	2:54:10 PM	BCl3 valve closed
5/27/2011	2:54:10 PM	PH3 valve closed
5/27/2011	2:54:10 PM	SiCl4 pre valve closed
5/27/2011	2:54:10 PM	SiCl4 post valve closed
5/27/2011	2:54:10 PM	Bubbler valve closed
5/27/2011	2:54:10 PM	Helium valve opened
5/27/2011	2:54:10 PM	Main Vac valve opened
5/27/2011	2:54:10 PM	Bypass valve opened
5/27/2011	2:54:10 PM	Helium MFC set to  100.000000
5/27/2011	2:54:10 PM	H2 MFC set to  0.000000
5/27/2011	2:54:10 PM	BCl3 MFC set to  0.000000
5/27/2011	2:54:10 PM	PHl3 MFC set to  0.000000
5/27/2011	2:54:10 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:54:10 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:54:11 PM	Tube furnace set to 0
5/27/2011	2:55:11 PM	Helium valve closed
5/27/2011	2:55:11 PM	H2 valve closed
5/27/2011	2:55:11 PM	BCl3 valve closed
5/27/2011	2:55:11 PM	PH3 valve closed
5/27/2011	2:55:11 PM	SiCl4 pre valve closed
5/27/2011	2:55:11 PM	SiCl4 post valve closed
5/27/2011	2:55:11 PM	Bubbler valve closed
5/27/2011	2:55:11 PM	Main Vac valve opened
5/27/2011	2:55:11 PM	Bypass valve opened
5/27/2011	2:55:11 PM	Helium MFC set to  0.000000
5/27/2011	2:55:11 PM	H2 MFC set to  0.000000
5/27/2011	2:55:11 PM	BCl3 MFC set to  0.000000
5/27/2011	2:55:11 PM	PHl3 MFC set to  0.000000
5/27/2011	2:55:11 PM	SiCl4 MFC set to  0.000000
5/27/2011	2:55:11 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	2:55:11 PM	Tube furnace set to 0
5/27/2011	2:55:12 PM	Run finished at 2:55 PM
5/27/2011	2:55:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/27/2011	3:05:35 PM	Recipe started at 3:05 PM
5/27/2011	3:05:35 PM	Helium valve closed
5/27/2011	3:05:35 PM	BCl3 valve closed
5/27/2011	3:05:35 PM	PH3 valve closed
5/27/2011	3:05:35 PM	SiCl4 pre valve closed
5/27/2011	3:05:35 PM	SiCl4 post valve closed
5/27/2011	3:05:35 PM	Main Vac valve closed
5/27/2011	3:05:35 PM	Bypass valve closed
5/27/2011	3:05:35 PM	Bubbler valve closed
5/27/2011	3:05:35 PM	H2 valve opened
5/27/2011	3:05:35 PM	Helium MFC set to  0.000000
5/27/2011	3:05:35 PM	H2 MFC set to  500.000000
5/27/2011	3:05:35 PM	BCl3 MFC set to  0.000000
5/27/2011	3:05:35 PM	PHl3 MFC set to  0.000000
5/27/2011	3:05:35 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:05:35 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:05:36 PM	Tube furnace set to 0
5/27/2011	3:06:59 PM	Helium valve closed
5/27/2011	3:06:59 PM	BCl3 valve closed
5/27/2011	3:06:59 PM	PH3 valve closed
5/27/2011	3:06:59 PM	SiCl4 pre valve closed
5/27/2011	3:06:59 PM	SiCl4 post valve closed
5/27/2011	3:06:59 PM	Main Vac valve closed
5/27/2011	3:06:59 PM	Bypass valve closed
5/27/2011	3:06:59 PM	H2 valve opened
5/27/2011	3:06:59 PM	Bubbler valve opened
5/27/2011	3:06:59 PM	Helium MFC set to  0.000000
5/27/2011	3:06:59 PM	H2 MFC set to  500.000000
5/27/2011	3:06:59 PM	BCl3 MFC set to  0.000000
5/27/2011	3:06:59 PM	PHl3 MFC set to  0.000000
5/27/2011	3:06:59 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:06:59 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:07:00 PM	Tube furnace set to 1000
5/27/2011	3:07:00 PM	Helium valve closed
5/27/2011	3:07:00 PM	H2 valve closed
5/27/2011	3:07:00 PM	BCl3 valve closed
5/27/2011	3:07:00 PM	PH3 valve closed
5/27/2011	3:07:00 PM	SiCl4 pre valve closed
5/27/2011	3:07:00 PM	SiCl4 post valve closed
5/27/2011	3:07:00 PM	Main Vac valve closed
5/27/2011	3:07:00 PM	Bubbler valve closed
5/27/2011	3:07:00 PM	Bypass valve closed
5/27/2011	3:07:00 PM	Helium MFC set to  0.000000
5/27/2011	3:07:00 PM	H2 MFC set to  0.000000
5/27/2011	3:07:00 PM	BCl3 MFC set to  0.000000
5/27/2011	3:07:00 PM	PHl3 MFC set to  0.000000
5/27/2011	3:07:00 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:07:00 PM	Bypass solenoid MFC set to  760.000000
5/27/2011	3:07:00 PM	Tube furnace set to 0
5/27/2011	3:07:00 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
5/27/2011	3:25:35 PM	Run aborted at 3:25 PM
5/27/2011	3:25:49 PM	Recipe started at 3:25 PM
5/27/2011	3:25:50 PM	Helium valve closed
5/27/2011	3:25:50 PM	BCl3 valve closed
5/27/2011	3:25:50 PM	PH3 valve closed
5/27/2011	3:25:50 PM	SiCl4 pre valve closed
5/27/2011	3:25:50 PM	SiCl4 post valve closed
5/27/2011	3:25:50 PM	Main Vac valve closed
5/27/2011	3:25:50 PM	Bypass valve closed
5/27/2011	3:25:50 PM	Bubbler valve closed
5/27/2011	3:25:50 PM	H2 valve opened
5/27/2011	3:25:50 PM	Helium MFC set to  0.000000
5/27/2011	3:25:50 PM	H2 MFC set to  500.000000
5/27/2011	3:25:50 PM	BCl3 MFC set to  0.000000
5/27/2011	3:25:50 PM	PHl3 MFC set to  0.000000
5/27/2011	3:25:50 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:25:50 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:25:50 PM	Tube furnace set to 0
5/27/2011	3:25:54 PM	Helium valve closed
5/27/2011	3:25:54 PM	BCl3 valve closed
5/27/2011	3:25:54 PM	PH3 valve closed
5/27/2011	3:25:54 PM	SiCl4 pre valve closed
5/27/2011	3:25:54 PM	SiCl4 post valve closed
5/27/2011	3:25:54 PM	Main Vac valve closed
5/27/2011	3:25:54 PM	Bypass valve closed
5/27/2011	3:25:54 PM	H2 valve opened
5/27/2011	3:25:54 PM	Bubbler valve opened
5/27/2011	3:25:54 PM	Helium MFC set to  0.000000
5/27/2011	3:25:54 PM	H2 MFC set to  500.000000
5/27/2011	3:25:54 PM	BCl3 MFC set to  0.000000
5/27/2011	3:25:54 PM	PHl3 MFC set to  0.000000
5/27/2011	3:25:54 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:25:54 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:25:54 PM	Tube furnace set to 1000
5/27/2011	3:25:55 PM	Helium valve closed
5/27/2011	3:25:55 PM	H2 valve closed
5/27/2011	3:25:55 PM	BCl3 valve closed
5/27/2011	3:25:55 PM	PH3 valve closed
5/27/2011	3:25:55 PM	SiCl4 pre valve closed
5/27/2011	3:25:55 PM	SiCl4 post valve closed
5/27/2011	3:25:55 PM	Main Vac valve closed
5/27/2011	3:25:55 PM	Bubbler valve closed
5/27/2011	3:25:55 PM	Bypass valve closed
5/27/2011	3:25:55 PM	Helium MFC set to  0.000000
5/27/2011	3:25:55 PM	H2 MFC set to  0.000000
5/27/2011	3:25:55 PM	BCl3 MFC set to  0.000000
5/27/2011	3:25:55 PM	PHl3 MFC set to  0.000000
5/27/2011	3:25:55 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:25:55 PM	Bypass solenoid MFC set to  760.000000
5/27/2011	3:25:55 PM	Tube furnace set to 0
5/27/2011	3:25:55 PM	Baratron reads 745.401633 Torr and NaOH valve is open.  Emergency exit.
5/27/2011	3:26:04 PM	Run aborted at 3:26 PM
5/27/2011	3:26:26 PM	Recipe started at 3:26 PM
5/27/2011	3:26:26 PM	Helium valve closed
5/27/2011	3:26:26 PM	BCl3 valve closed
5/27/2011	3:26:26 PM	PH3 valve closed
5/27/2011	3:26:26 PM	SiCl4 pre valve closed
5/27/2011	3:26:26 PM	SiCl4 post valve closed
5/27/2011	3:26:26 PM	Main Vac valve closed
5/27/2011	3:26:26 PM	Bypass valve closed
5/27/2011	3:26:26 PM	Bubbler valve closed
5/27/2011	3:26:26 PM	H2 valve opened
5/27/2011	3:26:26 PM	Helium MFC set to  0.000000
5/27/2011	3:26:26 PM	H2 MFC set to  500.000000
5/27/2011	3:26:26 PM	BCl3 MFC set to  0.000000
5/27/2011	3:26:26 PM	PHl3 MFC set to  0.000000
5/27/2011	3:26:26 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:26:26 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:26:27 PM	Tube furnace set to 0
5/27/2011	3:26:31 PM	Helium valve closed
5/27/2011	3:26:31 PM	BCl3 valve closed
5/27/2011	3:26:31 PM	PH3 valve closed
5/27/2011	3:26:31 PM	SiCl4 pre valve closed
5/27/2011	3:26:31 PM	SiCl4 post valve closed
5/27/2011	3:26:31 PM	Main Vac valve closed
5/27/2011	3:26:31 PM	Bypass valve closed
5/27/2011	3:26:31 PM	H2 valve opened
5/27/2011	3:26:31 PM	Bubbler valve opened
5/27/2011	3:26:31 PM	Helium MFC set to  0.000000
5/27/2011	3:26:31 PM	H2 MFC set to  500.000000
5/27/2011	3:26:31 PM	BCl3 MFC set to  0.000000
5/27/2011	3:26:31 PM	PHl3 MFC set to  0.000000
5/27/2011	3:26:31 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:26:31 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:26:31 PM	Tube furnace set to 1000
5/27/2011	3:26:31 PM	Helium valve closed
5/27/2011	3:26:31 PM	H2 valve closed
5/27/2011	3:26:31 PM	BCl3 valve closed
5/27/2011	3:26:31 PM	PH3 valve closed
5/27/2011	3:26:31 PM	SiCl4 pre valve closed
5/27/2011	3:26:31 PM	SiCl4 post valve closed
5/27/2011	3:26:31 PM	Main Vac valve closed
5/27/2011	3:26:31 PM	Bubbler valve closed
5/27/2011	3:26:31 PM	Bypass valve closed
5/27/2011	3:26:31 PM	Helium MFC set to  0.000000
5/27/2011	3:26:31 PM	H2 MFC set to  0.000000
5/27/2011	3:26:31 PM	BCl3 MFC set to  0.000000
5/27/2011	3:26:31 PM	PHl3 MFC set to  0.000000
5/27/2011	3:26:31 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:26:31 PM	Bypass solenoid MFC set to  760.000000
5/27/2011	3:26:31 PM	Tube furnace set to 0
5/27/2011	3:26:31 PM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
5/27/2011	3:27:42 PM	Run aborted at 3:27 PM
5/27/2011	3:27:46 PM	Recipe started at 3:27 PM
5/27/2011	3:27:46 PM	Helium valve closed
5/27/2011	3:27:46 PM	BCl3 valve closed
5/27/2011	3:27:46 PM	PH3 valve closed
5/27/2011	3:27:46 PM	SiCl4 pre valve closed
5/27/2011	3:27:46 PM	SiCl4 post valve closed
5/27/2011	3:27:46 PM	Main Vac valve closed
5/27/2011	3:27:46 PM	Bypass valve closed
5/27/2011	3:27:46 PM	Bubbler valve closed
5/27/2011	3:27:46 PM	H2 valve opened
5/27/2011	3:27:46 PM	Helium MFC set to  0.000000
5/27/2011	3:27:46 PM	H2 MFC set to  500.000000
5/27/2011	3:27:46 PM	BCl3 MFC set to  0.000000
5/27/2011	3:27:46 PM	PHl3 MFC set to  0.000000
5/27/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:27:46 PM	Tube furnace set to 0
5/27/2011	3:27:51 PM	Helium valve closed
5/27/2011	3:27:51 PM	BCl3 valve closed
5/27/2011	3:27:51 PM	PH3 valve closed
5/27/2011	3:27:51 PM	SiCl4 pre valve closed
5/27/2011	3:27:51 PM	SiCl4 post valve closed
5/27/2011	3:27:51 PM	Main Vac valve closed
5/27/2011	3:27:51 PM	Bypass valve closed
5/27/2011	3:27:51 PM	H2 valve opened
5/27/2011	3:27:51 PM	Bubbler valve opened
5/27/2011	3:27:51 PM	Helium MFC set to  0.000000
5/27/2011	3:27:51 PM	H2 MFC set to  500.000000
5/27/2011	3:27:51 PM	BCl3 MFC set to  0.000000
5/27/2011	3:27:51 PM	PHl3 MFC set to  0.000000
5/27/2011	3:27:51 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:27:51 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:27:51 PM	Tube furnace set to 1000
5/27/2011	3:47:51 PM	H2 valve closed
5/27/2011	3:47:51 PM	BCl3 valve closed
5/27/2011	3:47:51 PM	PH3 valve closed
5/27/2011	3:47:51 PM	SiCl4 pre valve closed
5/27/2011	3:47:51 PM	SiCl4 post valve closed
5/27/2011	3:47:51 PM	Main Vac valve closed
5/27/2011	3:47:51 PM	Bypass valve closed
5/27/2011	3:47:51 PM	Helium valve opened
5/27/2011	3:47:51 PM	Bubbler valve opened
5/27/2011	3:47:51 PM	Helium MFC set to  500.000000
5/27/2011	3:47:51 PM	H2 MFC set to  0.000000
5/27/2011	3:47:51 PM	BCl3 MFC set to  0.000000
5/27/2011	3:47:51 PM	PHl3 MFC set to  0.000000
5/27/2011	3:47:51 PM	SiCl4 MFC set to  0.000000
5/27/2011	3:47:51 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	3:47:51 PM	Tube furnace set to 0
5/27/2011	4:07:51 PM	Helium valve closed
5/27/2011	4:07:51 PM	H2 valve closed
5/27/2011	4:07:51 PM	BCl3 valve closed
5/27/2011	4:07:51 PM	PH3 valve closed
5/27/2011	4:07:51 PM	SiCl4 pre valve closed
5/27/2011	4:07:51 PM	SiCl4 post valve closed
5/27/2011	4:07:51 PM	Main Vac valve closed
5/27/2011	4:07:51 PM	Bypass valve closed
5/27/2011	4:07:51 PM	Bubbler valve closed
5/27/2011	4:07:51 PM	Helium MFC set to  0.000000
5/27/2011	4:07:51 PM	H2 MFC set to  0.000000
5/27/2011	4:07:51 PM	BCl3 MFC set to  0.000000
5/27/2011	4:07:51 PM	PHl3 MFC set to  0.000000
5/27/2011	4:07:51 PM	SiCl4 MFC set to  0.000000
5/27/2011	4:07:51 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	4:07:51 PM	Tube furnace set to 0
5/27/2011	4:07:51 PM	Run finished at 4:07 PM
5/27/2011	4:40:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/27/2011	4:40:13 PM	Recipe started at 4:40 PM
5/27/2011	4:40:13 PM	Helium valve closed
5/27/2011	4:40:13 PM	H2 valve closed
5/27/2011	4:40:13 PM	BCl3 valve closed
5/27/2011	4:40:13 PM	PH3 valve closed
5/27/2011	4:40:13 PM	SiCl4 pre valve closed
5/27/2011	4:40:13 PM	SiCl4 post valve closed
5/27/2011	4:40:13 PM	Main Vac valve closed
5/27/2011	4:40:13 PM	Bubbler valve closed
5/27/2011	4:40:13 PM	Bypass valve opened
5/27/2011	4:40:13 PM	Helium MFC set to  0.000000
5/27/2011	4:40:13 PM	H2 MFC set to  0.000000
5/27/2011	4:40:13 PM	BCl3 MFC set to  0.000000
5/27/2011	4:40:13 PM	PHl3 MFC set to  0.000000
5/27/2011	4:40:13 PM	SiCl4 MFC set to  0.000000
5/27/2011	4:40:13 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	4:40:13 PM	Tube furnace set to 0
5/27/2011	4:40:44 PM	Helium valve closed
5/27/2011	4:40:44 PM	H2 valve closed
5/27/2011	4:40:44 PM	BCl3 valve closed
5/27/2011	4:40:44 PM	PH3 valve closed
5/27/2011	4:40:44 PM	SiCl4 pre valve closed
5/27/2011	4:40:44 PM	SiCl4 post valve closed
5/27/2011	4:40:44 PM	Bubbler valve closed
5/27/2011	4:40:44 PM	Main Vac valve opened
5/27/2011	4:40:44 PM	Bypass valve opened
5/27/2011	4:40:44 PM	Helium MFC set to  0.000000
5/27/2011	4:40:44 PM	H2 MFC set to  0.000000
5/27/2011	4:40:44 PM	BCl3 MFC set to  0.000000
5/27/2011	4:40:44 PM	PHl3 MFC set to  0.000000
5/27/2011	4:40:44 PM	SiCl4 MFC set to  0.000000
5/27/2011	4:40:44 PM	Bypass solenoid MFC set to  0.000000
5/27/2011	4:40:44 PM	Tube furnace set to 0
5/27/2011	4:40:44 PM	Run finished at 4:40 PM
5/27/2011	4:40:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
